3/19/2012	12:07:02 AM	Helium valve closed
3/19/2012	12:07:02 AM	H2 valve closed
3/19/2012	12:07:02 AM	BCl3 valve closed
3/19/2012	12:07:02 AM	PH3 valve closed
3/19/2012	12:07:02 AM	SiCl4 pre valve closed
3/19/2012	12:07:02 AM	SiCl4 post valve closed
3/19/2012	12:07:02 AM	Main Vac valve closed
3/19/2012	12:07:02 AM	Bypass valve closed
3/19/2012	12:07:02 AM	Bubbler valve closed
3/19/2012	12:07:02 AM	Helium MFC set to  0.000000
3/19/2012	12:07:02 AM	H2 MFC set to  0.000000
3/19/2012	12:07:02 AM	BCl3 MFC set to  0.000000
3/19/2012	12:07:02 AM	PH3 MFC set to  0.000000
3/19/2012	12:07:02 AM	SiCl4 MFC set to  0.000000
3/19/2012	12:07:02 AM	Bypass solenoid MFC set to  0.000000
3/19/2012	12:07:02 AM	Tube furnace set to 0
3/19/2012	12:27:02 AM	Helium valve closed
3/19/2012	12:27:02 AM	H2 valve closed
3/19/2012	12:27:02 AM	BCl3 valve closed
3/19/2012	12:27:02 AM	PH3 valve closed
3/19/2012	12:27:02 AM	SiCl4 pre valve closed
3/19/2012	12:27:02 AM	SiCl4 post valve closed
3/19/2012	12:27:02 AM	Main Vac valve closed
3/19/2012	12:27:02 AM	Bubbler valve closed
3/19/2012	12:27:02 AM	Bypass valve opened
3/19/2012	12:27:02 AM	Helium MFC set to  0.000000
3/19/2012	12:27:02 AM	H2 MFC set to  0.000000
3/19/2012	12:27:02 AM	BCl3 MFC set to  0.000000
3/19/2012	12:27:02 AM	PH3 MFC set to  0.000000
3/19/2012	12:27:02 AM	SiCl4 MFC set to  0.000000
3/19/2012	12:27:02 AM	Bypass solenoid MFC set to  0.000000
3/19/2012	12:27:02 AM	Tube furnace set to 0
3/19/2012	12:27:48 AM	Helium valve closed
3/19/2012	12:27:48 AM	H2 valve closed
3/19/2012	12:27:48 AM	BCl3 valve closed
3/19/2012	12:27:48 AM	PH3 valve closed
3/19/2012	12:27:48 AM	SiCl4 pre valve closed
3/19/2012	12:27:48 AM	SiCl4 post valve closed
3/19/2012	12:27:48 AM	Main Vac valve closed
3/19/2012	12:27:48 AM	Bubbler valve closed
3/19/2012	12:27:48 AM	Bypass valve opened
3/19/2012	12:27:48 AM	Helium MFC set to  0.000000
3/19/2012	12:27:48 AM	H2 MFC set to  0.000000
3/19/2012	12:27:48 AM	BCl3 MFC set to  0.000000
3/19/2012	12:27:48 AM	PH3 MFC set to  0.000000
3/19/2012	12:27:48 AM	SiCl4 MFC set to  0.000000
3/19/2012	12:27:48 AM	Bypass solenoid MFC set to  0.000000
3/19/2012	12:27:48 AM	Tube furnace set to 0
3/19/2012	12:28:48 AM	Helium valve closed
3/19/2012	12:28:48 AM	H2 valve closed
3/19/2012	12:28:48 AM	BCl3 valve closed
3/19/2012	12:28:48 AM	PH3 valve closed
3/19/2012	12:28:48 AM	SiCl4 pre valve closed
3/19/2012	12:28:48 AM	SiCl4 post valve closed
3/19/2012	12:28:48 AM	Bypass valve closed
3/19/2012	12:28:48 AM	Bubbler valve closed
3/19/2012	12:28:48 AM	Main Vac valve opened
3/19/2012	12:28:48 AM	Helium MFC set to  0.000000
3/19/2012	12:28:48 AM	H2 MFC set to  0.000000
3/19/2012	12:28:48 AM	BCl3 MFC set to  0.000000
3/19/2012	12:28:48 AM	PH3 MFC set to  0.000000
3/19/2012	12:28:48 AM	SiCl4 MFC set to  0.000000
3/19/2012	12:28:48 AM	Bypass solenoid MFC set to  0.000000
3/19/2012	12:28:48 AM	Tube furnace set to 0
3/19/2012	1:28:48 AM	Run finished at 1:28 AM
3/19/2012	8:04:12 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/19/2012	8:04:13 AM	Recipe started at 8:04 AM
3/19/2012	8:04:13 AM	Helium valve closed
3/19/2012	8:04:13 AM	H2 valve closed
3/19/2012	8:04:13 AM	BCl3 valve closed
3/19/2012	8:04:13 AM	PH3 valve closed
3/19/2012	8:04:13 AM	SiCl4 pre valve closed
3/19/2012	8:04:13 AM	SiCl4 post valve closed
3/19/2012	8:04:13 AM	Main Vac valve closed
3/19/2012	8:04:13 AM	Bypass valve closed
3/19/2012	8:04:13 AM	Bubbler valve closed
3/19/2012	8:04:13 AM	Helium MFC set to  0.000000
3/19/2012	8:04:13 AM	H2 MFC set to  0.000000
3/19/2012	8:04:13 AM	BCl3 MFC set to  0.000000
3/19/2012	8:04:13 AM	PH3 MFC set to  0.000000
3/19/2012	8:04:13 AM	SiCl4 MFC set to  0.000000
3/19/2012	8:04:13 AM	Bypass solenoid MFC set to  0.000000
3/19/2012	8:04:13 AM	Tube furnace set to 0
3/19/2012	8:04:16 AM	H2 valve closed
3/19/2012	8:04:16 AM	BCl3 valve closed
3/19/2012	8:04:16 AM	PH3 valve closed
3/19/2012	8:04:16 AM	SiCl4 pre valve closed
3/19/2012	8:04:16 AM	SiCl4 post valve closed
3/19/2012	8:04:16 AM	Main Vac valve closed
3/19/2012	8:04:16 AM	Bypass valve closed
3/19/2012	8:04:16 AM	Bubbler valve closed
3/19/2012	8:04:16 AM	Helium valve opened
3/19/2012	8:04:16 AM	Helium MFC set to  500.000000
3/19/2012	8:04:16 AM	H2 MFC set to  0.000000
3/19/2012	8:04:16 AM	BCl3 MFC set to  0.000000
3/19/2012	8:04:16 AM	PH3 MFC set to  0.000000
3/19/2012	8:04:16 AM	SiCl4 MFC set to  0.000000
3/19/2012	8:04:16 AM	Bypass solenoid MFC set to  0.000000
3/19/2012	8:04:16 AM	Tube furnace set to 0
3/19/2012	8:05:22 AM	Helium valve closed
3/19/2012	8:05:22 AM	H2 valve closed
3/19/2012	8:05:22 AM	BCl3 valve closed
3/19/2012	8:05:22 AM	PH3 valve closed
3/19/2012	8:05:22 AM	SiCl4 pre valve closed
3/19/2012	8:05:22 AM	SiCl4 post valve closed
3/19/2012	8:05:22 AM	Main Vac valve closed
3/19/2012	8:05:22 AM	Bypass valve closed
3/19/2012	8:05:22 AM	Bubbler valve closed
3/19/2012	8:05:22 AM	Helium MFC set to  0.000000
3/19/2012	8:05:22 AM	H2 MFC set to  0.000000
3/19/2012	8:05:22 AM	BCl3 MFC set to  0.000000
3/19/2012	8:05:22 AM	PH3 MFC set to  0.000000
3/19/2012	8:05:22 AM	SiCl4 MFC set to  0.000000
3/19/2012	8:05:22 AM	Bypass solenoid MFC set to  0.000000
3/19/2012	8:05:22 AM	Tube furnace set to 0
3/19/2012	8:05:23 AM	Run finished at 8:05 AM
3/19/2012	8:05:23 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/19/2012	8:08:50 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/19/2012	8:08:51 AM	Recipe started at 8:08 AM
3/19/2012	8:08:51 AM	Helium valve closed
3/19/2012	8:08:51 AM	H2 valve closed
3/19/2012	8:08:51 AM	BCl3 valve closed
3/19/2012	8:08:51 AM	PH3 valve closed
3/19/2012	8:08:51 AM	SiCl4 pre valve closed
3/19/2012	8:08:51 AM	SiCl4 post valve closed
3/19/2012	8:08:51 AM	Main Vac valve closed
3/19/2012	8:08:51 AM	Bubbler valve closed
3/19/2012	8:08:51 AM	Bypass valve opened
3/19/2012	8:08:51 AM	Helium MFC set to  0.000000
3/19/2012	8:08:51 AM	H2 MFC set to  0.000000
3/19/2012	8:08:51 AM	BCl3 MFC set to  0.000000
3/19/2012	8:08:51 AM	PH3 MFC set to  0.000000
3/19/2012	8:08:51 AM	SiCl4 MFC set to  0.000000
3/19/2012	8:08:51 AM	Bypass solenoid MFC set to  0.000000
3/19/2012	8:08:51 AM	Tube furnace set to 0
3/19/2012	8:09:51 AM	Helium valve closed
3/19/2012	8:09:51 AM	H2 valve closed
3/19/2012	8:09:51 AM	BCl3 valve closed
3/19/2012	8:09:51 AM	PH3 valve closed
3/19/2012	8:09:51 AM	SiCl4 pre valve closed
3/19/2012	8:09:51 AM	SiCl4 post valve closed
3/19/2012	8:09:51 AM	Main Vac valve closed
3/19/2012	8:09:51 AM	Bubbler valve closed
3/19/2012	8:09:51 AM	Bypass valve opened
3/19/2012	8:09:51 AM	Helium MFC set to  0.000000
3/19/2012	8:09:51 AM	H2 MFC set to  0.000000
3/19/2012	8:09:51 AM	BCl3 MFC set to  0.000000
3/19/2012	8:09:51 AM	PH3 MFC set to  0.000000
3/19/2012	8:09:51 AM	SiCl4 MFC set to  0.000000
3/19/2012	8:09:51 AM	Bypass solenoid MFC set to  0.000000
3/19/2012	8:09:51 AM	Tube furnace set to 0
3/19/2012	8:10:51 AM	Helium valve closed
3/19/2012	8:10:51 AM	H2 valve closed
3/19/2012	8:10:51 AM	BCl3 valve closed
3/19/2012	8:10:51 AM	PH3 valve closed
3/19/2012	8:10:51 AM	SiCl4 pre valve closed
3/19/2012	8:10:51 AM	SiCl4 post valve closed
3/19/2012	8:10:51 AM	Bypass valve closed
3/19/2012	8:10:51 AM	Bubbler valve closed
3/19/2012	8:10:51 AM	Main Vac valve opened
3/19/2012	8:10:51 AM	Helium MFC set to  0.000000
3/19/2012	8:10:51 AM	H2 MFC set to  0.000000
3/19/2012	8:10:51 AM	BCl3 MFC set to  0.000000
3/19/2012	8:10:51 AM	PH3 MFC set to  0.000000
3/19/2012	8:10:51 AM	SiCl4 MFC set to  0.000000
3/19/2012	8:10:51 AM	Bypass solenoid MFC set to  0.000000
3/19/2012	8:10:51 AM	Tube furnace set to 0
3/19/2012	8:10:52 AM	Run finished at 8:10 AM
3/19/2012	8:10:52 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/19/2012	8:11:11 AM	Recipe started at 8:11 AM
3/19/2012	8:11:12 AM	Helium valve closed
3/19/2012	8:11:12 AM	H2 valve closed
3/19/2012	8:11:12 AM	BCl3 valve closed
3/19/2012	8:11:12 AM	PH3 valve closed
3/19/2012	8:11:12 AM	SiCl4 pre valve closed
3/19/2012	8:11:12 AM	SiCl4 post valve closed
3/19/2012	8:11:12 AM	Bypass valve closed
3/19/2012	8:11:12 AM	Bubbler valve closed
3/19/2012	8:11:12 AM	Main Vac valve opened
3/19/2012	8:11:12 AM	Helium MFC set to  0.000000
3/19/2012	8:11:12 AM	H2 MFC set to  0.000000
3/19/2012	8:11:12 AM	BCl3 MFC set to  0.000000
3/19/2012	8:11:12 AM	PH3 MFC set to  0.000000
3/19/2012	8:11:12 AM	SiCl4 MFC set to  0.000000
3/19/2012	8:11:12 AM	Bypass solenoid MFC set to  0.000000
3/19/2012	8:11:12 AM	Tube furnace set to 0
3/19/2012	9:41:12 AM	Helium valve closed
3/19/2012	9:41:12 AM	H2 valve closed
3/19/2012	9:41:12 AM	BCl3 valve closed
3/19/2012	9:41:12 AM	PH3 valve closed
3/19/2012	9:41:12 AM	SiCl4 pre valve closed
3/19/2012	9:41:12 AM	SiCl4 post valve closed
3/19/2012	9:41:12 AM	Main Vac valve closed
3/19/2012	9:41:12 AM	Bypass valve closed
3/19/2012	9:41:12 AM	Bubbler valve closed
3/19/2012	9:41:12 AM	Helium MFC set to  0.000000
3/19/2012	9:41:12 AM	H2 MFC set to  0.000000
3/19/2012	9:41:12 AM	BCl3 MFC set to  0.000000
3/19/2012	9:41:12 AM	PH3 MFC set to  0.000000
3/19/2012	9:41:12 AM	SiCl4 MFC set to  0.000000
3/19/2012	9:41:12 AM	Bypass solenoid MFC set to  0.000000
3/19/2012	9:41:12 AM	Tube furnace set to 0
3/19/2012	9:41:15 AM	Helium valve closed
3/19/2012	9:41:15 AM	BCl3 valve closed
3/19/2012	9:41:15 AM	PH3 valve closed
3/19/2012	9:41:15 AM	SiCl4 pre valve closed
3/19/2012	9:41:15 AM	SiCl4 post valve closed
3/19/2012	9:41:15 AM	Main Vac valve closed
3/19/2012	9:41:15 AM	Bypass valve closed
3/19/2012	9:41:15 AM	Bubbler valve closed
3/19/2012	9:41:15 AM	H2 valve opened
3/19/2012	9:41:15 AM	Helium MFC set to  0.000000
3/19/2012	9:41:15 AM	H2 MFC set to  500.000000
3/19/2012	9:41:15 AM	BCl3 MFC set to  0.000000
3/19/2012	9:41:15 AM	PH3 MFC set to  0.000000
3/19/2012	9:41:15 AM	SiCl4 MFC set to  0.000000
3/19/2012	9:41:15 AM	Bypass solenoid MFC set to  0.000000
3/19/2012	9:41:15 AM	Tube furnace set to 0
3/19/2012	9:42:24 AM	Helium valve closed
3/19/2012	9:42:24 AM	BCl3 valve closed
3/19/2012	9:42:24 AM	PH3 valve closed
3/19/2012	9:42:24 AM	SiCl4 pre valve closed
3/19/2012	9:42:24 AM	SiCl4 post valve closed
3/19/2012	9:42:24 AM	Main Vac valve closed
3/19/2012	9:42:24 AM	Bypass valve closed
3/19/2012	9:42:24 AM	H2 valve opened
3/19/2012	9:42:24 AM	Bubbler valve opened
3/19/2012	9:42:24 AM	Helium MFC set to  0.000000
3/19/2012	9:42:24 AM	H2 MFC set to  500.000000
3/19/2012	9:42:24 AM	BCl3 MFC set to  0.000000
3/19/2012	9:42:24 AM	PH3 MFC set to  0.000000
3/19/2012	9:42:24 AM	SiCl4 MFC set to  0.000000
3/19/2012	9:42:24 AM	Bypass solenoid MFC set to  0.000000
3/19/2012	9:42:24 AM	Tube furnace set to 0
3/19/2012	9:42:25 AM	Helium valve closed
3/19/2012	9:42:25 AM	BCl3 valve closed
3/19/2012	9:42:25 AM	PH3 valve closed
3/19/2012	9:42:25 AM	SiCl4 pre valve closed
3/19/2012	9:42:25 AM	SiCl4 post valve closed
3/19/2012	9:42:25 AM	Main Vac valve closed
3/19/2012	9:42:25 AM	Bypass valve closed
3/19/2012	9:42:25 AM	H2 valve opened
3/19/2012	9:42:25 AM	Bubbler valve opened
3/19/2012	9:42:25 AM	Helium MFC set to  0.000000
3/19/2012	9:42:25 AM	H2 MFC set to  500.000000
3/19/2012	9:42:25 AM	BCl3 MFC set to  0.000000
3/19/2012	9:42:25 AM	PH3 MFC set to  0.000000
3/19/2012	9:42:25 AM	SiCl4 MFC set to  0.000000
3/19/2012	9:42:25 AM	Bypass solenoid MFC set to  0.000000
3/19/2012	9:42:25 AM	Tube furnace set to 1000
3/19/2012	10:07:25 AM	Helium valve closed
3/19/2012	10:07:25 AM	PH3 valve closed
3/19/2012	10:07:25 AM	Main Vac valve closed
3/19/2012	10:07:25 AM	Bypass valve closed
3/19/2012	10:07:25 AM	H2 valve opened
3/19/2012	10:07:25 AM	BCl3 valve opened
3/19/2012	10:07:25 AM	SiCl4 pre valve opened
3/19/2012	10:07:25 AM	SiCl4 post valve opened
3/19/2012	10:07:25 AM	Bubbler valve opened
3/19/2012	10:07:25 AM	Helium MFC set to  0.000000
3/19/2012	10:07:25 AM	H2 MFC set to  450.000000
3/19/2012	10:07:25 AM	BCl3 MFC set to  1.500000
3/19/2012	10:07:25 AM	PH3 MFC set to  0.000000
3/19/2012	10:07:25 AM	SiCl4 MFC set to  50.000000
3/19/2012	10:07:25 AM	Bypass solenoid MFC set to  0.000000
3/19/2012	10:07:25 AM	Tube furnace set to 1000
3/19/2012	10:28:25 AM	Helium valve closed
3/19/2012	10:28:25 AM	BCl3 valve closed
3/19/2012	10:28:25 AM	PH3 valve closed
3/19/2012	10:28:25 AM	SiCl4 pre valve closed
3/19/2012	10:28:25 AM	SiCl4 post valve closed
3/19/2012	10:28:25 AM	Main Vac valve closed
3/19/2012	10:28:25 AM	Bypass valve closed
3/19/2012	10:28:25 AM	H2 valve opened
3/19/2012	10:28:25 AM	Bubbler valve opened
3/19/2012	10:28:25 AM	Helium MFC set to  0.000000
3/19/2012	10:28:25 AM	H2 MFC set to  500.000000
3/19/2012	10:28:25 AM	BCl3 MFC set to  0.000000
3/19/2012	10:28:26 AM	PH3 MFC set to  0.000000
3/19/2012	10:28:26 AM	SiCl4 MFC set to  0.000000
3/19/2012	10:28:26 AM	Bypass solenoid MFC set to  0.000000
3/19/2012	10:28:26 AM	Tube furnace set to 750
3/19/2012	10:43:26 AM	H2 valve closed
3/19/2012	10:43:26 AM	BCl3 valve closed
3/19/2012	10:43:26 AM	PH3 valve closed
3/19/2012	10:43:26 AM	SiCl4 pre valve closed
3/19/2012	10:43:26 AM	SiCl4 post valve closed
3/19/2012	10:43:26 AM	Main Vac valve closed
3/19/2012	10:43:26 AM	Bypass valve closed
3/19/2012	10:43:26 AM	Helium valve opened
3/19/2012	10:43:26 AM	Bubbler valve opened
3/19/2012	10:43:26 AM	Helium MFC set to  500.000000
3/19/2012	10:43:26 AM	H2 MFC set to  0.000000
3/19/2012	10:43:26 AM	BCl3 MFC set to  0.000000
3/19/2012	10:43:26 AM	PH3 MFC set to  0.000000
3/19/2012	10:43:26 AM	SiCl4 MFC set to  0.000000
3/19/2012	10:43:26 AM	Bypass solenoid MFC set to  0.000000
3/19/2012	10:43:26 AM	Tube furnace set to 0
3/19/2012	11:03:26 AM	Helium valve closed
3/19/2012	11:03:26 AM	H2 valve closed
3/19/2012	11:03:26 AM	BCl3 valve closed
3/19/2012	11:03:26 AM	PH3 valve closed
3/19/2012	11:03:26 AM	SiCl4 pre valve closed
3/19/2012	11:03:26 AM	SiCl4 post valve closed
3/19/2012	11:03:26 AM	Main Vac valve closed
3/19/2012	11:03:26 AM	Bypass valve closed
3/19/2012	11:03:26 AM	Bubbler valve closed
3/19/2012	11:03:26 AM	Helium MFC set to  0.000000
3/19/2012	11:03:26 AM	H2 MFC set to  0.000000
3/19/2012	11:03:26 AM	BCl3 MFC set to  0.000000
3/19/2012	11:03:26 AM	PH3 MFC set to  0.000000
3/19/2012	11:03:26 AM	SiCl4 MFC set to  0.000000
3/19/2012	11:03:26 AM	Bypass solenoid MFC set to  0.000000
3/19/2012	11:03:26 AM	Tube furnace set to 0
3/19/2012	11:23:26 AM	Helium valve closed
3/19/2012	11:23:26 AM	H2 valve closed
3/19/2012	11:23:26 AM	BCl3 valve closed
3/19/2012	11:23:26 AM	PH3 valve closed
3/19/2012	11:23:26 AM	SiCl4 pre valve closed
3/19/2012	11:23:26 AM	SiCl4 post valve closed
3/19/2012	11:23:26 AM	Main Vac valve closed
3/19/2012	11:23:26 AM	Bubbler valve closed
3/19/2012	11:23:26 AM	Bypass valve opened
3/19/2012	11:23:26 AM	Helium MFC set to  0.000000
3/19/2012	11:23:26 AM	H2 MFC set to  0.000000
3/19/2012	11:23:26 AM	BCl3 MFC set to  0.000000
3/19/2012	11:23:26 AM	PH3 MFC set to  0.000000
3/19/2012	11:23:26 AM	SiCl4 MFC set to  0.000000
3/19/2012	11:23:26 AM	Bypass solenoid MFC set to  0.000000
3/19/2012	11:23:26 AM	Tube furnace set to 0
3/19/2012	11:24:12 AM	Helium valve closed
3/19/2012	11:24:12 AM	H2 valve closed
3/19/2012	11:24:12 AM	BCl3 valve closed
3/19/2012	11:24:12 AM	PH3 valve closed
3/19/2012	11:24:12 AM	SiCl4 pre valve closed
3/19/2012	11:24:12 AM	SiCl4 post valve closed
3/19/2012	11:24:12 AM	Main Vac valve closed
3/19/2012	11:24:12 AM	Bubbler valve closed
3/19/2012	11:24:12 AM	Bypass valve opened
3/19/2012	11:24:12 AM	Helium MFC set to  0.000000
3/19/2012	11:24:12 AM	H2 MFC set to  0.000000
3/19/2012	11:24:12 AM	BCl3 MFC set to  0.000000
3/19/2012	11:24:12 AM	PH3 MFC set to  0.000000
3/19/2012	11:24:12 AM	SiCl4 MFC set to  0.000000
3/19/2012	11:24:12 AM	Bypass solenoid MFC set to  0.000000
3/19/2012	11:24:12 AM	Tube furnace set to 0
3/19/2012	11:25:12 AM	Helium valve closed
3/19/2012	11:25:12 AM	H2 valve closed
3/19/2012	11:25:12 AM	BCl3 valve closed
3/19/2012	11:25:12 AM	PH3 valve closed
3/19/2012	11:25:12 AM	SiCl4 pre valve closed
3/19/2012	11:25:12 AM	SiCl4 post valve closed
3/19/2012	11:25:12 AM	Bypass valve closed
3/19/2012	11:25:12 AM	Bubbler valve closed
3/19/2012	11:25:12 AM	Main Vac valve opened
3/19/2012	11:25:12 AM	Helium MFC set to  0.000000
3/19/2012	11:25:12 AM	H2 MFC set to  0.000000
3/19/2012	11:25:12 AM	BCl3 MFC set to  0.000000
3/19/2012	11:25:12 AM	PH3 MFC set to  0.000000
3/19/2012	11:25:12 AM	SiCl4 MFC set to  0.000000
3/19/2012	11:25:12 AM	Bypass solenoid MFC set to  0.000000
3/19/2012	11:25:12 AM	Tube furnace set to 0
3/19/2012	11:54:10 AM	Run aborted at 11:54 AM
3/19/2012	11:54:10 AM	Helium valve closed
3/19/2012	11:54:10 AM	H2 valve closed
3/19/2012	11:54:10 AM	BCl3 valve closed
3/19/2012	11:54:10 AM	PH3 valve closed
3/19/2012	11:54:10 AM	SiCl4 pre valve closed
3/19/2012	11:54:10 AM	SiCl4 post valve closed
3/19/2012	11:54:10 AM	Bypass valve closed
3/19/2012	11:54:10 AM	Main Vac valve closed
3/19/2012	11:54:10 AM	Bubbler valve closed
3/19/2012	11:54:10 AM	Helium MFC set to  0.000000
3/19/2012	11:54:10 AM	H2 MFC set to  0.000000
3/19/2012	11:54:10 AM	BCl3 MFC set to  0.000000
3/19/2012	11:54:10 AM	PH3 MFC set to  0.000000
3/19/2012	11:54:10 AM	SiCl4 MFC set to  0.000000
3/19/2012	11:54:10 AM	Tube furnace set to 0
3/19/2012	11:54:11 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/19/2012	11:54:12 AM	Recipe started at 11:54 AM
3/19/2012	11:54:12 AM	Helium valve closed
3/19/2012	11:54:12 AM	H2 valve closed
3/19/2012	11:54:12 AM	BCl3 valve closed
3/19/2012	11:54:12 AM	PH3 valve closed
3/19/2012	11:54:12 AM	SiCl4 pre valve closed
3/19/2012	11:54:12 AM	SiCl4 post valve closed
3/19/2012	11:54:12 AM	Main Vac valve closed
3/19/2012	11:54:12 AM	Bypass valve closed
3/19/2012	11:54:12 AM	Bubbler valve closed
3/19/2012	11:54:12 AM	Helium MFC set to  0.000000
3/19/2012	11:54:12 AM	H2 MFC set to  0.000000
3/19/2012	11:54:12 AM	BCl3 MFC set to  0.000000
3/19/2012	11:54:12 AM	PH3 MFC set to  0.000000
3/19/2012	11:54:12 AM	SiCl4 MFC set to  0.000000
3/19/2012	11:54:12 AM	Bypass solenoid MFC set to  0.000000
3/19/2012	11:54:12 AM	Tube furnace set to 0
3/19/2012	11:54:15 AM	H2 valve closed
3/19/2012	11:54:15 AM	BCl3 valve closed
3/19/2012	11:54:15 AM	PH3 valve closed
3/19/2012	11:54:15 AM	SiCl4 pre valve closed
3/19/2012	11:54:15 AM	SiCl4 post valve closed
3/19/2012	11:54:15 AM	Main Vac valve closed
3/19/2012	11:54:15 AM	Bypass valve closed
3/19/2012	11:54:15 AM	Bubbler valve closed
3/19/2012	11:54:15 AM	Helium valve opened
3/19/2012	11:54:15 AM	Helium MFC set to  500.000000
3/19/2012	11:54:15 AM	H2 MFC set to  0.000000
3/19/2012	11:54:15 AM	BCl3 MFC set to  0.000000
3/19/2012	11:54:15 AM	PH3 MFC set to  0.000000
3/19/2012	11:54:15 AM	SiCl4 MFC set to  0.000000
3/19/2012	11:54:15 AM	Bypass solenoid MFC set to  0.000000
3/19/2012	11:54:16 AM	Tube furnace set to 0
3/19/2012	11:55:15 AM	Helium valve closed
3/19/2012	11:55:15 AM	H2 valve closed
3/19/2012	11:55:15 AM	BCl3 valve closed
3/19/2012	11:55:15 AM	PH3 valve closed
3/19/2012	11:55:15 AM	SiCl4 pre valve closed
3/19/2012	11:55:15 AM	SiCl4 post valve closed
3/19/2012	11:55:15 AM	Main Vac valve closed
3/19/2012	11:55:15 AM	Bypass valve closed
3/19/2012	11:55:15 AM	Bubbler valve closed
3/19/2012	11:55:15 AM	Helium MFC set to  0.000000
3/19/2012	11:55:15 AM	H2 MFC set to  0.000000
3/19/2012	11:55:15 AM	BCl3 MFC set to  0.000000
3/19/2012	11:55:15 AM	PH3 MFC set to  0.000000
3/19/2012	11:55:16 AM	SiCl4 MFC set to  0.000000
3/19/2012	11:55:16 AM	Bypass solenoid MFC set to  0.000000
3/19/2012	11:55:16 AM	Tube furnace set to 0
3/19/2012	11:55:17 AM	Run finished at 11:55 AM
3/19/2012	11:55:17 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/19/2012	11:57:24 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/19/2012	11:57:25 AM	Recipe started at 11:57 AM
3/19/2012	11:57:25 AM	Helium valve closed
3/19/2012	11:57:25 AM	H2 valve closed
3/19/2012	11:57:25 AM	BCl3 valve closed
3/19/2012	11:57:25 AM	PH3 valve closed
3/19/2012	11:57:25 AM	SiCl4 pre valve closed
3/19/2012	11:57:25 AM	SiCl4 post valve closed
3/19/2012	11:57:25 AM	Main Vac valve closed
3/19/2012	11:57:25 AM	Bypass valve closed
3/19/2012	11:57:25 AM	Bubbler valve closed
3/19/2012	11:57:25 AM	Helium MFC set to  0.000000
3/19/2012	11:57:25 AM	H2 MFC set to  0.000000
3/19/2012	11:57:25 AM	BCl3 MFC set to  0.000000
3/19/2012	11:57:25 AM	PH3 MFC set to  0.000000
3/19/2012	11:57:25 AM	SiCl4 MFC set to  0.000000
3/19/2012	11:57:25 AM	Bypass solenoid MFC set to  0.000000
3/19/2012	11:57:25 AM	Tube furnace set to 0
3/19/2012	11:57:28 AM	H2 valve closed
3/19/2012	11:57:28 AM	BCl3 valve closed
3/19/2012	11:57:28 AM	PH3 valve closed
3/19/2012	11:57:28 AM	SiCl4 pre valve closed
3/19/2012	11:57:28 AM	SiCl4 post valve closed
3/19/2012	11:57:28 AM	Main Vac valve closed
3/19/2012	11:57:28 AM	Bypass valve closed
3/19/2012	11:57:28 AM	Bubbler valve closed
3/19/2012	11:57:28 AM	Helium valve opened
3/19/2012	11:57:28 AM	Helium MFC set to  500.000000
3/19/2012	11:57:28 AM	H2 MFC set to  0.000000
3/19/2012	11:57:28 AM	BCl3 MFC set to  0.000000
3/19/2012	11:57:28 AM	PH3 MFC set to  0.000000
3/19/2012	11:57:28 AM	SiCl4 MFC set to  0.000000
3/19/2012	11:57:28 AM	Bypass solenoid MFC set to  0.000000
3/19/2012	11:57:29 AM	Tube furnace set to 0
3/19/2012	11:57:30 AM	Helium valve closed
3/19/2012	11:57:30 AM	H2 valve closed
3/19/2012	11:57:30 AM	BCl3 valve closed
3/19/2012	11:57:30 AM	PH3 valve closed
3/19/2012	11:57:30 AM	SiCl4 pre valve closed
3/19/2012	11:57:30 AM	SiCl4 post valve closed
3/19/2012	11:57:30 AM	Main Vac valve closed
3/19/2012	11:57:30 AM	Bypass valve closed
3/19/2012	11:57:30 AM	Bubbler valve closed
3/19/2012	11:57:30 AM	Helium MFC set to  0.000000
3/19/2012	11:57:30 AM	H2 MFC set to  0.000000
3/19/2012	11:57:30 AM	BCl3 MFC set to  0.000000
3/19/2012	11:57:30 AM	PH3 MFC set to  0.000000
3/19/2012	11:57:30 AM	SiCl4 MFC set to  0.000000
3/19/2012	11:57:30 AM	Bypass solenoid MFC set to  0.000000
3/19/2012	11:57:30 AM	Tube furnace set to 0
3/19/2012	11:57:31 AM	Run finished at 11:57 AM
3/19/2012	11:57:31 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/19/2012	12:00:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/19/2012	12:00:20 PM	Recipe started at 12:00 PM
3/19/2012	12:00:20 PM	Helium valve closed
3/19/2012	12:00:20 PM	H2 valve closed
3/19/2012	12:00:20 PM	BCl3 valve closed
3/19/2012	12:00:20 PM	PH3 valve closed
3/19/2012	12:00:20 PM	SiCl4 pre valve closed
3/19/2012	12:00:20 PM	SiCl4 post valve closed
3/19/2012	12:00:20 PM	Main Vac valve closed
3/19/2012	12:00:20 PM	Bubbler valve closed
3/19/2012	12:00:20 PM	Bypass valve opened
3/19/2012	12:00:20 PM	Helium MFC set to  0.000000
3/19/2012	12:00:20 PM	H2 MFC set to  0.000000
3/19/2012	12:00:20 PM	BCl3 MFC set to  0.000000
3/19/2012	12:00:20 PM	PH3 MFC set to  0.000000
3/19/2012	12:00:20 PM	SiCl4 MFC set to  0.000000
3/19/2012	12:00:20 PM	Bypass solenoid MFC set to  0.000000
3/19/2012	12:00:20 PM	Tube furnace set to 0
3/19/2012	12:01:17 PM	Helium valve closed
3/19/2012	12:01:17 PM	H2 valve closed
3/19/2012	12:01:17 PM	BCl3 valve closed
3/19/2012	12:01:17 PM	PH3 valve closed
3/19/2012	12:01:17 PM	SiCl4 pre valve closed
3/19/2012	12:01:17 PM	SiCl4 post valve closed
3/19/2012	12:01:17 PM	Main Vac valve closed
3/19/2012	12:01:17 PM	Bubbler valve closed
3/19/2012	12:01:17 PM	Bypass valve opened
3/19/2012	12:01:17 PM	Helium MFC set to  0.000000
3/19/2012	12:01:17 PM	H2 MFC set to  0.000000
3/19/2012	12:01:17 PM	BCl3 MFC set to  0.000000
3/19/2012	12:01:17 PM	PH3 MFC set to  0.000000
3/19/2012	12:01:17 PM	SiCl4 MFC set to  0.000000
3/19/2012	12:01:17 PM	Bypass solenoid MFC set to  0.000000
3/19/2012	12:01:17 PM	Tube furnace set to 0
3/19/2012	12:02:17 PM	Helium valve closed
3/19/2012	12:02:17 PM	H2 valve closed
3/19/2012	12:02:17 PM	BCl3 valve closed
3/19/2012	12:02:17 PM	PH3 valve closed
3/19/2012	12:02:17 PM	SiCl4 pre valve closed
3/19/2012	12:02:17 PM	SiCl4 post valve closed
3/19/2012	12:02:17 PM	Bypass valve closed
3/19/2012	12:02:17 PM	Bubbler valve closed
3/19/2012	12:02:17 PM	Main Vac valve opened
3/19/2012	12:02:17 PM	Helium MFC set to  0.000000
3/19/2012	12:02:17 PM	H2 MFC set to  0.000000
3/19/2012	12:02:17 PM	BCl3 MFC set to  0.000000
3/19/2012	12:02:17 PM	PH3 MFC set to  0.000000
3/19/2012	12:02:17 PM	SiCl4 MFC set to  0.000000
3/19/2012	12:02:17 PM	Bypass solenoid MFC set to  0.000000
3/19/2012	12:02:18 PM	Tube furnace set to 0
3/19/2012	12:02:19 PM	Run finished at 12:02 PM
3/19/2012	12:02:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/19/2012	1:19:04 PM	Main Vac valve closed
3/19/2012	1:19:30 PM	Main Vac valve opened
3/19/2012	1:20:32 PM	Recipe started at 1:20 PM
3/19/2012	1:20:32 PM	Helium valve closed
3/19/2012	1:20:32 PM	H2 valve closed
3/19/2012	1:20:32 PM	BCl3 valve closed
3/19/2012	1:20:32 PM	PH3 valve closed
3/19/2012	1:20:32 PM	SiCl4 pre valve closed
3/19/2012	1:20:32 PM	SiCl4 post valve closed
3/19/2012	1:20:32 PM	Bypass valve closed
3/19/2012	1:20:32 PM	Bubbler valve closed
3/19/2012	1:20:32 PM	Main Vac valve opened
3/19/2012	1:20:32 PM	Helium MFC set to  0.000000
3/19/2012	1:20:32 PM	H2 MFC set to  0.000000
3/19/2012	1:20:32 PM	BCl3 MFC set to  0.000000
3/19/2012	1:20:32 PM	PH3 MFC set to  0.000000
3/19/2012	1:20:32 PM	SiCl4 MFC set to  0.000000
3/19/2012	1:20:32 PM	Bypass solenoid MFC set to  0.000000
3/19/2012	1:20:32 PM	Tube furnace set to 0
3/19/2012	1:21:32 PM	Helium valve closed
3/19/2012	1:21:32 PM	H2 valve closed
3/19/2012	1:21:32 PM	BCl3 valve closed
3/19/2012	1:21:32 PM	PH3 valve closed
3/19/2012	1:21:32 PM	SiCl4 pre valve closed
3/19/2012	1:21:32 PM	SiCl4 post valve closed
3/19/2012	1:21:32 PM	Main Vac valve closed
3/19/2012	1:21:32 PM	Bypass valve closed
3/19/2012	1:21:32 PM	Bubbler valve closed
3/19/2012	1:21:32 PM	Helium MFC set to  0.000000
3/19/2012	1:21:32 PM	H2 MFC set to  0.000000
3/19/2012	1:21:32 PM	BCl3 MFC set to  0.000000
3/19/2012	1:21:32 PM	PH3 MFC set to  0.000000
3/19/2012	1:21:32 PM	SiCl4 MFC set to  0.000000
3/19/2012	1:21:32 PM	Bypass solenoid MFC set to  0.000000
3/19/2012	1:21:32 PM	Tube furnace set to 0
3/19/2012	1:21:35 PM	Helium valve closed
3/19/2012	1:21:35 PM	BCl3 valve closed
3/19/2012	1:21:35 PM	PH3 valve closed
3/19/2012	1:21:35 PM	SiCl4 pre valve closed
3/19/2012	1:21:35 PM	SiCl4 post valve closed
3/19/2012	1:21:35 PM	Main Vac valve closed
3/19/2012	1:21:35 PM	Bypass valve closed
3/19/2012	1:21:35 PM	Bubbler valve closed
3/19/2012	1:21:35 PM	H2 valve opened
3/19/2012	1:21:35 PM	Helium MFC set to  0.000000
3/19/2012	1:21:35 PM	H2 MFC set to  500.000000
3/19/2012	1:21:35 PM	BCl3 MFC set to  0.000000
3/19/2012	1:21:35 PM	PH3 MFC set to  0.000000
3/19/2012	1:21:35 PM	SiCl4 MFC set to  0.000000
3/19/2012	1:21:35 PM	Bypass solenoid MFC set to  0.000000
3/19/2012	1:21:35 PM	Tube furnace set to 0
3/19/2012	1:22:41 PM	Helium valve closed
3/19/2012	1:22:41 PM	BCl3 valve closed
3/19/2012	1:22:41 PM	PH3 valve closed
3/19/2012	1:22:41 PM	SiCl4 pre valve closed
3/19/2012	1:22:41 PM	SiCl4 post valve closed
3/19/2012	1:22:41 PM	Main Vac valve closed
3/19/2012	1:22:41 PM	Bypass valve closed
3/19/2012	1:22:41 PM	H2 valve opened
3/19/2012	1:22:41 PM	Bubbler valve opened
3/19/2012	1:22:41 PM	Helium MFC set to  0.000000
3/19/2012	1:22:41 PM	H2 MFC set to  500.000000
3/19/2012	1:22:41 PM	BCl3 MFC set to  0.000000
3/19/2012	1:22:41 PM	PH3 MFC set to  0.000000
3/19/2012	1:22:41 PM	SiCl4 MFC set to  0.000000
3/19/2012	1:22:41 PM	Bypass solenoid MFC set to  0.000000
3/19/2012	1:22:41 PM	Tube furnace set to 0
3/19/2012	1:22:42 PM	Helium valve closed
3/19/2012	1:22:42 PM	BCl3 valve closed
3/19/2012	1:22:42 PM	PH3 valve closed
3/19/2012	1:22:42 PM	SiCl4 pre valve closed
3/19/2012	1:22:42 PM	SiCl4 post valve closed
3/19/2012	1:22:42 PM	Main Vac valve closed
3/19/2012	1:22:42 PM	Bypass valve closed
3/19/2012	1:22:42 PM	H2 valve opened
3/19/2012	1:22:42 PM	Bubbler valve opened
3/19/2012	1:22:42 PM	Helium MFC set to  0.000000
3/19/2012	1:22:42 PM	H2 MFC set to  500.000000
3/19/2012	1:22:42 PM	BCl3 MFC set to  0.000000
3/19/2012	1:22:42 PM	PH3 MFC set to  0.000000
3/19/2012	1:22:42 PM	SiCl4 MFC set to  0.000000
3/19/2012	1:22:42 PM	Bypass solenoid MFC set to  0.000000
3/19/2012	1:22:42 PM	Tube furnace set to 1000
3/19/2012	1:47:42 PM	Helium valve closed
3/19/2012	1:47:43 PM	PH3 valve closed
3/19/2012	1:47:43 PM	Main Vac valve closed
3/19/2012	1:47:43 PM	Bypass valve closed
3/19/2012	1:47:43 PM	H2 valve opened
3/19/2012	1:47:43 PM	BCl3 valve opened
3/19/2012	1:47:43 PM	SiCl4 pre valve opened
3/19/2012	1:47:43 PM	SiCl4 post valve opened
3/19/2012	1:47:43 PM	Bubbler valve opened
3/19/2012	1:47:43 PM	Helium MFC set to  0.000000
3/19/2012	1:47:43 PM	H2 MFC set to  450.000000
3/19/2012	1:47:43 PM	BCl3 MFC set to  1.500000
3/19/2012	1:47:43 PM	PH3 MFC set to  0.000000
3/19/2012	1:47:43 PM	SiCl4 MFC set to  50.000000
3/19/2012	1:47:43 PM	Bypass solenoid MFC set to  0.000000
3/19/2012	1:47:43 PM	Tube furnace set to 1000
3/19/2012	2:09:43 PM	Helium valve closed
3/19/2012	2:09:43 PM	BCl3 valve closed
3/19/2012	2:09:43 PM	PH3 valve closed
3/19/2012	2:09:43 PM	SiCl4 pre valve closed
3/19/2012	2:09:43 PM	SiCl4 post valve closed
3/19/2012	2:09:43 PM	Main Vac valve closed
3/19/2012	2:09:43 PM	Bypass valve closed
3/19/2012	2:09:43 PM	H2 valve opened
3/19/2012	2:09:43 PM	Bubbler valve opened
3/19/2012	2:09:43 PM	Helium MFC set to  0.000000
3/19/2012	2:09:43 PM	H2 MFC set to  500.000000
3/19/2012	2:09:43 PM	BCl3 MFC set to  0.000000
3/19/2012	2:09:43 PM	PH3 MFC set to  0.000000
3/19/2012	2:09:43 PM	SiCl4 MFC set to  0.000000
3/19/2012	2:09:43 PM	Bypass solenoid MFC set to  0.000000
3/19/2012	2:09:43 PM	Tube furnace set to 750
3/19/2012	2:24:43 PM	H2 valve closed
3/19/2012	2:24:43 PM	BCl3 valve closed
3/19/2012	2:24:43 PM	PH3 valve closed
3/19/2012	2:24:43 PM	SiCl4 pre valve closed
3/19/2012	2:24:43 PM	SiCl4 post valve closed
3/19/2012	2:24:43 PM	Main Vac valve closed
3/19/2012	2:24:43 PM	Bypass valve closed
3/19/2012	2:24:43 PM	Helium valve opened
3/19/2012	2:24:43 PM	Bubbler valve opened
3/19/2012	2:24:43 PM	Helium MFC set to  500.000000
3/19/2012	2:24:43 PM	H2 MFC set to  0.000000
3/19/2012	2:24:43 PM	BCl3 MFC set to  0.000000
3/19/2012	2:24:43 PM	PH3 MFC set to  0.000000
3/19/2012	2:24:43 PM	SiCl4 MFC set to  0.000000
3/19/2012	2:24:43 PM	Bypass solenoid MFC set to  0.000000
3/19/2012	2:24:43 PM	Tube furnace set to 0
3/19/2012	2:44:43 PM	Helium valve closed
3/19/2012	2:44:43 PM	H2 valve closed
3/19/2012	2:44:43 PM	BCl3 valve closed
3/19/2012	2:44:43 PM	PH3 valve closed
3/19/2012	2:44:43 PM	SiCl4 pre valve closed
3/19/2012	2:44:43 PM	SiCl4 post valve closed
3/19/2012	2:44:43 PM	Main Vac valve closed
3/19/2012	2:44:43 PM	Bypass valve closed
3/19/2012	2:44:43 PM	Bubbler valve closed
3/19/2012	2:44:43 PM	Helium MFC set to  0.000000
3/19/2012	2:44:43 PM	H2 MFC set to  0.000000
3/19/2012	2:44:43 PM	BCl3 MFC set to  0.000000
3/19/2012	2:44:43 PM	PH3 MFC set to  0.000000
3/19/2012	2:44:43 PM	SiCl4 MFC set to  0.000000
3/19/2012	2:44:43 PM	Bypass solenoid MFC set to  0.000000
3/19/2012	2:44:43 PM	Tube furnace set to 0
3/19/2012	3:01:19 PM	Run aborted at 3:01 PM
3/19/2012	3:01:19 PM	Helium valve closed
3/19/2012	3:01:19 PM	H2 valve closed
3/19/2012	3:01:19 PM	BCl3 valve closed
3/19/2012	3:01:19 PM	PH3 valve closed
3/19/2012	3:01:19 PM	SiCl4 pre valve closed
3/19/2012	3:01:19 PM	SiCl4 post valve closed
3/19/2012	3:01:19 PM	Bypass valve closed
3/19/2012	3:01:19 PM	Main Vac valve closed
3/19/2012	3:01:19 PM	Bubbler valve closed
3/19/2012	3:01:19 PM	Helium MFC set to  0.000000
3/19/2012	3:01:19 PM	H2 MFC set to  0.000000
3/19/2012	3:01:19 PM	BCl3 MFC set to  0.000000
3/19/2012	3:01:19 PM	PH3 MFC set to  0.000000
3/19/2012	3:01:19 PM	SiCl4 MFC set to  0.000000
3/19/2012	3:01:20 PM	Tube furnace set to 0
3/19/2012	3:01:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/19/2012	3:01:29 PM	Recipe started at 3:01 PM
3/19/2012	3:01:29 PM	Helium valve closed
3/19/2012	3:01:29 PM	H2 valve closed
3/19/2012	3:01:29 PM	BCl3 valve closed
3/19/2012	3:01:29 PM	PH3 valve closed
3/19/2012	3:01:29 PM	SiCl4 pre valve closed
3/19/2012	3:01:29 PM	SiCl4 post valve closed
3/19/2012	3:01:29 PM	Main Vac valve closed
3/19/2012	3:01:29 PM	Bypass valve closed
3/19/2012	3:01:29 PM	Bubbler valve closed
3/19/2012	3:01:29 PM	Helium MFC set to  0.000000
3/19/2012	3:01:29 PM	H2 MFC set to  0.000000
3/19/2012	3:01:29 PM	BCl3 MFC set to  0.000000
3/19/2012	3:01:29 PM	PH3 MFC set to  0.000000
3/19/2012	3:01:29 PM	SiCl4 MFC set to  0.000000
3/19/2012	3:01:29 PM	Bypass solenoid MFC set to  0.000000
3/19/2012	3:01:29 PM	Tube furnace set to 0
3/19/2012	3:01:32 PM	H2 valve closed
3/19/2012	3:01:32 PM	BCl3 valve closed
3/19/2012	3:01:32 PM	PH3 valve closed
3/19/2012	3:01:32 PM	SiCl4 pre valve closed
3/19/2012	3:01:32 PM	SiCl4 post valve closed
3/19/2012	3:01:32 PM	Main Vac valve closed
3/19/2012	3:01:32 PM	Bypass valve closed
3/19/2012	3:01:32 PM	Bubbler valve closed
3/19/2012	3:01:32 PM	Helium valve opened
3/19/2012	3:01:32 PM	Helium MFC set to  500.000000
3/19/2012	3:01:32 PM	H2 MFC set to  0.000000
3/19/2012	3:01:32 PM	BCl3 MFC set to  0.000000
3/19/2012	3:01:32 PM	PH3 MFC set to  0.000000
3/19/2012	3:01:32 PM	SiCl4 MFC set to  0.000000
3/19/2012	3:01:32 PM	Bypass solenoid MFC set to  0.000000
3/19/2012	3:01:33 PM	Tube furnace set to 0
3/19/2012	3:01:38 PM	Helium valve closed
3/19/2012	3:01:38 PM	H2 valve closed
3/19/2012	3:01:38 PM	BCl3 valve closed
3/19/2012	3:01:38 PM	PH3 valve closed
3/19/2012	3:01:38 PM	SiCl4 pre valve closed
3/19/2012	3:01:38 PM	SiCl4 post valve closed
3/19/2012	3:01:38 PM	Main Vac valve closed
3/19/2012	3:01:38 PM	Bypass valve closed
3/19/2012	3:01:38 PM	Bubbler valve closed
3/19/2012	3:01:38 PM	Helium MFC set to  0.000000
3/19/2012	3:01:38 PM	H2 MFC set to  0.000000
3/19/2012	3:01:38 PM	BCl3 MFC set to  0.000000
3/19/2012	3:01:38 PM	PH3 MFC set to  0.000000
3/19/2012	3:01:38 PM	SiCl4 MFC set to  0.000000
3/19/2012	3:01:38 PM	Bypass solenoid MFC set to  0.000000
3/19/2012	3:01:38 PM	Tube furnace set to 0
3/19/2012	3:01:39 PM	Run finished at 3:01 PM
3/19/2012	3:01:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/19/2012	3:05:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/19/2012	3:05:08 PM	Recipe started at 3:05 PM
3/19/2012	3:05:08 PM	Helium valve closed
3/19/2012	3:05:08 PM	H2 valve closed
3/19/2012	3:05:08 PM	BCl3 valve closed
3/19/2012	3:05:08 PM	PH3 valve closed
3/19/2012	3:05:08 PM	SiCl4 pre valve closed
3/19/2012	3:05:08 PM	SiCl4 post valve closed
3/19/2012	3:05:08 PM	Main Vac valve closed
3/19/2012	3:05:08 PM	Bubbler valve closed
3/19/2012	3:05:08 PM	Bypass valve opened
3/19/2012	3:05:08 PM	Helium MFC set to  0.000000
3/19/2012	3:05:08 PM	H2 MFC set to  0.000000
3/19/2012	3:05:08 PM	BCl3 MFC set to  0.000000
3/19/2012	3:05:08 PM	PH3 MFC set to  0.000000
3/19/2012	3:05:08 PM	SiCl4 MFC set to  0.000000
3/19/2012	3:05:08 PM	Bypass solenoid MFC set to  0.000000
3/19/2012	3:05:08 PM	Tube furnace set to 0
3/19/2012	3:06:07 PM	Helium valve closed
3/19/2012	3:06:07 PM	H2 valve closed
3/19/2012	3:06:07 PM	BCl3 valve closed
3/19/2012	3:06:07 PM	PH3 valve closed
3/19/2012	3:06:07 PM	SiCl4 pre valve closed
3/19/2012	3:06:07 PM	SiCl4 post valve closed
3/19/2012	3:06:07 PM	Main Vac valve closed
3/19/2012	3:06:07 PM	Bubbler valve closed
3/19/2012	3:06:07 PM	Bypass valve opened
3/19/2012	3:06:07 PM	Helium MFC set to  0.000000
3/19/2012	3:06:07 PM	H2 MFC set to  0.000000
3/19/2012	3:06:07 PM	BCl3 MFC set to  0.000000
3/19/2012	3:06:07 PM	PH3 MFC set to  0.000000
3/19/2012	3:06:07 PM	SiCl4 MFC set to  0.000000
3/19/2012	3:06:07 PM	Bypass solenoid MFC set to  0.000000
3/19/2012	3:06:07 PM	Tube furnace set to 0
3/19/2012	3:07:07 PM	Helium valve closed
3/19/2012	3:07:07 PM	H2 valve closed
3/19/2012	3:07:07 PM	BCl3 valve closed
3/19/2012	3:07:07 PM	PH3 valve closed
3/19/2012	3:07:07 PM	SiCl4 pre valve closed
3/19/2012	3:07:07 PM	SiCl4 post valve closed
3/19/2012	3:07:07 PM	Bypass valve closed
3/19/2012	3:07:07 PM	Bubbler valve closed
3/19/2012	3:07:07 PM	Main Vac valve opened
3/19/2012	3:07:07 PM	Helium MFC set to  0.000000
3/19/2012	3:07:07 PM	H2 MFC set to  0.000000
3/19/2012	3:07:07 PM	BCl3 MFC set to  0.000000
3/19/2012	3:07:07 PM	PH3 MFC set to  0.000000
3/19/2012	3:07:07 PM	SiCl4 MFC set to  0.000000
3/19/2012	3:07:07 PM	Bypass solenoid MFC set to  0.000000
3/19/2012	3:07:08 PM	Tube furnace set to 0
3/19/2012	3:07:09 PM	Run finished at 3:07 PM
3/19/2012	3:07:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/19/2012	4:29:04 PM	Main Vac valve closed
3/19/2012	4:29:27 PM	Main Vac valve opened
3/19/2012	4:34:14 PM	Recipe started at 4:34 PM
3/19/2012	4:34:14 PM	Helium valve closed
3/19/2012	4:34:14 PM	H2 valve closed
3/19/2012	4:34:14 PM	BCl3 valve closed
3/19/2012	4:34:14 PM	PH3 valve closed
3/19/2012	4:34:14 PM	SiCl4 pre valve closed
3/19/2012	4:34:15 PM	SiCl4 post valve closed
3/19/2012	4:34:15 PM	Bypass valve closed
3/19/2012	4:34:15 PM	Bubbler valve closed
3/19/2012	4:34:15 PM	Main Vac valve opened
3/19/2012	4:34:15 PM	Helium MFC set to  0.000000
3/19/2012	4:34:15 PM	H2 MFC set to  0.000000
3/19/2012	4:34:15 PM	BCl3 MFC set to  0.000000
3/19/2012	4:34:15 PM	PH3 MFC set to  0.000000
3/19/2012	4:34:15 PM	SiCl4 MFC set to  0.000000
3/19/2012	4:34:15 PM	Bypass solenoid MFC set to  0.000000
3/19/2012	4:34:15 PM	Tube furnace set to 0
3/19/2012	4:35:15 PM	Helium valve closed
3/19/2012	4:35:15 PM	H2 valve closed
3/19/2012	4:35:15 PM	BCl3 valve closed
3/19/2012	4:35:15 PM	PH3 valve closed
3/19/2012	4:35:15 PM	SiCl4 pre valve closed
3/19/2012	4:35:15 PM	SiCl4 post valve closed
3/19/2012	4:35:15 PM	Main Vac valve closed
3/19/2012	4:35:15 PM	Bypass valve closed
3/19/2012	4:35:15 PM	Bubbler valve closed
3/19/2012	4:35:15 PM	Helium MFC set to  0.000000
3/19/2012	4:35:15 PM	H2 MFC set to  0.000000
3/19/2012	4:35:15 PM	BCl3 MFC set to  0.000000
3/19/2012	4:35:15 PM	PH3 MFC set to  0.000000
3/19/2012	4:35:15 PM	SiCl4 MFC set to  0.000000
3/19/2012	4:35:15 PM	Bypass solenoid MFC set to  0.000000
3/19/2012	4:35:15 PM	Tube furnace set to 0
3/19/2012	4:35:18 PM	Helium valve closed
3/19/2012	4:35:18 PM	BCl3 valve closed
3/19/2012	4:35:18 PM	PH3 valve closed
3/19/2012	4:35:18 PM	SiCl4 pre valve closed
3/19/2012	4:35:18 PM	SiCl4 post valve closed
3/19/2012	4:35:18 PM	Main Vac valve closed
3/19/2012	4:35:18 PM	Bypass valve closed
3/19/2012	4:35:18 PM	Bubbler valve closed
3/19/2012	4:35:18 PM	H2 valve opened
3/19/2012	4:35:18 PM	Helium MFC set to  0.000000
3/19/2012	4:35:18 PM	H2 MFC set to  500.000000
3/19/2012	4:35:18 PM	BCl3 MFC set to  0.000000
3/19/2012	4:35:18 PM	PH3 MFC set to  0.000000
3/19/2012	4:35:18 PM	SiCl4 MFC set to  0.000000
3/19/2012	4:35:18 PM	Bypass solenoid MFC set to  0.000000
3/19/2012	4:35:18 PM	Tube furnace set to 0
3/19/2012	4:36:23 PM	Helium valve closed
3/19/2012	4:36:23 PM	BCl3 valve closed
3/19/2012	4:36:23 PM	PH3 valve closed
3/19/2012	4:36:23 PM	SiCl4 pre valve closed
3/19/2012	4:36:24 PM	SiCl4 post valve closed
3/19/2012	4:36:24 PM	Main Vac valve closed
3/19/2012	4:36:24 PM	Bypass valve closed
3/19/2012	4:36:24 PM	H2 valve opened
3/19/2012	4:36:24 PM	Bubbler valve opened
3/19/2012	4:36:24 PM	Helium MFC set to  0.000000
3/19/2012	4:36:24 PM	H2 MFC set to  500.000000
3/19/2012	4:36:24 PM	BCl3 MFC set to  0.000000
3/19/2012	4:36:24 PM	PH3 MFC set to  0.000000
3/19/2012	4:36:24 PM	SiCl4 MFC set to  0.000000
3/19/2012	4:36:24 PM	Bypass solenoid MFC set to  0.000000
3/19/2012	4:36:24 PM	Tube furnace set to 0
3/19/2012	4:36:25 PM	Helium valve closed
3/19/2012	4:36:25 PM	BCl3 valve closed
3/19/2012	4:36:25 PM	PH3 valve closed
3/19/2012	4:36:25 PM	SiCl4 pre valve closed
3/19/2012	4:36:25 PM	SiCl4 post valve closed
3/19/2012	4:36:25 PM	Main Vac valve closed
3/19/2012	4:36:25 PM	Bypass valve closed
3/19/2012	4:36:25 PM	H2 valve opened
3/19/2012	4:36:25 PM	Bubbler valve opened
3/19/2012	4:36:25 PM	Helium MFC set to  0.000000
3/19/2012	4:36:25 PM	H2 MFC set to  500.000000
3/19/2012	4:36:25 PM	BCl3 MFC set to  0.000000
3/19/2012	4:36:25 PM	PH3 MFC set to  0.000000
3/19/2012	4:36:25 PM	SiCl4 MFC set to  0.000000
3/19/2012	4:36:25 PM	Bypass solenoid MFC set to  0.000000
3/19/2012	4:36:25 PM	Tube furnace set to 1000
3/19/2012	5:01:25 PM	Helium valve closed
3/19/2012	5:01:25 PM	PH3 valve closed
3/19/2012	5:01:25 PM	Main Vac valve closed
3/19/2012	5:01:25 PM	Bypass valve closed
3/19/2012	5:01:25 PM	H2 valve opened
3/19/2012	5:01:25 PM	BCl3 valve opened
3/19/2012	5:01:25 PM	SiCl4 pre valve opened
3/19/2012	5:01:25 PM	SiCl4 post valve opened
3/19/2012	5:01:25 PM	Bubbler valve opened
3/19/2012	5:01:25 PM	Helium MFC set to  0.000000
3/19/2012	5:01:25 PM	H2 MFC set to  450.000000
3/19/2012	5:01:25 PM	BCl3 MFC set to  1.500000
3/19/2012	5:01:25 PM	PH3 MFC set to  0.000000
3/19/2012	5:01:25 PM	SiCl4 MFC set to  50.000000
3/19/2012	5:01:25 PM	Bypass solenoid MFC set to  0.000000
3/19/2012	5:01:25 PM	Tube furnace set to 1000
3/19/2012	5:30:25 PM	Helium valve closed
3/19/2012	5:30:25 PM	BCl3 valve closed
3/19/2012	5:30:25 PM	PH3 valve closed
3/19/2012	5:30:25 PM	SiCl4 pre valve closed
3/19/2012	5:30:25 PM	SiCl4 post valve closed
3/19/2012	5:30:25 PM	Main Vac valve closed
3/19/2012	5:30:25 PM	Bypass valve closed
3/19/2012	5:30:25 PM	H2 valve opened
3/19/2012	5:30:25 PM	Bubbler valve opened
3/19/2012	5:30:25 PM	Helium MFC set to  0.000000
3/19/2012	5:30:25 PM	H2 MFC set to  500.000000
3/19/2012	5:30:25 PM	BCl3 MFC set to  0.000000
3/19/2012	5:30:25 PM	PH3 MFC set to  0.000000
3/19/2012	5:30:25 PM	SiCl4 MFC set to  0.000000
3/19/2012	5:30:25 PM	Bypass solenoid MFC set to  0.000000
3/19/2012	5:30:25 PM	Tube furnace set to 750
3/19/2012	5:45:25 PM	H2 valve closed
3/19/2012	5:45:25 PM	BCl3 valve closed
3/19/2012	5:45:25 PM	PH3 valve closed
3/19/2012	5:45:25 PM	SiCl4 pre valve closed
3/19/2012	5:45:25 PM	SiCl4 post valve closed
3/19/2012	5:45:25 PM	Main Vac valve closed
3/19/2012	5:45:25 PM	Bypass valve closed
3/19/2012	5:45:25 PM	Helium valve opened
3/19/2012	5:45:25 PM	Bubbler valve opened
3/19/2012	5:45:25 PM	Helium MFC set to  500.000000
3/19/2012	5:45:25 PM	H2 MFC set to  0.000000
3/19/2012	5:45:25 PM	BCl3 MFC set to  0.000000
3/19/2012	5:45:25 PM	PH3 MFC set to  0.000000
3/19/2012	5:45:25 PM	SiCl4 MFC set to  0.000000
3/19/2012	5:45:25 PM	Bypass solenoid MFC set to  0.000000
3/19/2012	5:45:26 PM	Tube furnace set to 0
3/19/2012	6:05:26 PM	Helium valve closed
3/19/2012	6:05:26 PM	H2 valve closed
3/19/2012	6:05:26 PM	BCl3 valve closed
3/19/2012	6:05:26 PM	PH3 valve closed
3/19/2012	6:05:26 PM	SiCl4 pre valve closed
3/19/2012	6:05:26 PM	SiCl4 post valve closed
3/19/2012	6:05:26 PM	Main Vac valve closed
3/19/2012	6:05:26 PM	Bypass valve closed
3/19/2012	6:05:26 PM	Bubbler valve closed
3/19/2012	6:05:26 PM	Helium MFC set to  0.000000
3/19/2012	6:05:26 PM	H2 MFC set to  0.000000
3/19/2012	6:05:26 PM	BCl3 MFC set to  0.000000
3/19/2012	6:05:26 PM	PH3 MFC set to  0.000000
3/19/2012	6:05:26 PM	SiCl4 MFC set to  0.000000
3/19/2012	6:05:26 PM	Bypass solenoid MFC set to  0.000000
3/19/2012	6:05:26 PM	Tube furnace set to 0
3/19/2012	6:18:51 PM	Run aborted at 6:18 PM
3/19/2012	6:18:51 PM	Helium valve closed
3/19/2012	6:18:51 PM	H2 valve closed
3/19/2012	6:18:51 PM	BCl3 valve closed
3/19/2012	6:18:51 PM	PH3 valve closed
3/19/2012	6:18:51 PM	SiCl4 pre valve closed
3/19/2012	6:18:51 PM	SiCl4 post valve closed
3/19/2012	6:18:51 PM	Bypass valve closed
3/19/2012	6:18:51 PM	Main Vac valve closed
3/19/2012	6:18:51 PM	Bubbler valve closed
3/19/2012	6:18:51 PM	Helium MFC set to  0.000000
3/19/2012	6:18:51 PM	H2 MFC set to  0.000000
3/19/2012	6:18:51 PM	BCl3 MFC set to  0.000000
3/19/2012	6:18:51 PM	PH3 MFC set to  0.000000
3/19/2012	6:18:51 PM	SiCl4 MFC set to  0.000000
3/19/2012	6:18:51 PM	Tube furnace set to 0
3/19/2012	6:27:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/19/2012	6:27:45 PM	Recipe started at 6:27 PM
3/19/2012	6:27:45 PM	Helium valve closed
3/19/2012	6:27:45 PM	H2 valve closed
3/19/2012	6:27:45 PM	BCl3 valve closed
3/19/2012	6:27:45 PM	PH3 valve closed
3/19/2012	6:27:45 PM	SiCl4 pre valve closed
3/19/2012	6:27:45 PM	SiCl4 post valve closed
3/19/2012	6:27:45 PM	Main Vac valve closed
3/19/2012	6:27:45 PM	Bypass valve closed
3/19/2012	6:27:45 PM	Bubbler valve closed
3/19/2012	6:27:45 PM	Helium MFC set to  0.000000
3/19/2012	6:27:45 PM	H2 MFC set to  0.000000
3/19/2012	6:27:45 PM	BCl3 MFC set to  0.000000
3/19/2012	6:27:45 PM	PH3 MFC set to  0.000000
3/19/2012	6:27:45 PM	SiCl4 MFC set to  0.000000
3/19/2012	6:27:45 PM	Bypass solenoid MFC set to  0.000000
3/19/2012	6:27:45 PM	Tube furnace set to 0
3/19/2012	6:27:48 PM	H2 valve closed
3/19/2012	6:27:48 PM	BCl3 valve closed
3/19/2012	6:27:48 PM	PH3 valve closed
3/19/2012	6:27:48 PM	SiCl4 pre valve closed
3/19/2012	6:27:48 PM	SiCl4 post valve closed
3/19/2012	6:27:48 PM	Main Vac valve closed
3/19/2012	6:27:48 PM	Bypass valve closed
3/19/2012	6:27:48 PM	Bubbler valve closed
3/19/2012	6:27:48 PM	Helium valve opened
3/19/2012	6:27:48 PM	Helium MFC set to  500.000000
3/19/2012	6:27:48 PM	H2 MFC set to  0.000000
3/19/2012	6:27:48 PM	BCl3 MFC set to  0.000000
3/19/2012	6:27:48 PM	PH3 MFC set to  0.000000
3/19/2012	6:27:48 PM	SiCl4 MFC set to  0.000000
3/19/2012	6:27:48 PM	Bypass solenoid MFC set to  0.000000
3/19/2012	6:27:48 PM	Tube furnace set to 0
3/19/2012	6:27:54 PM	Helium valve closed
3/19/2012	6:27:54 PM	H2 valve closed
3/19/2012	6:27:54 PM	BCl3 valve closed
3/19/2012	6:27:54 PM	PH3 valve closed
3/19/2012	6:27:54 PM	SiCl4 pre valve closed
3/19/2012	6:27:54 PM	SiCl4 post valve closed
3/19/2012	6:27:54 PM	Main Vac valve closed
3/19/2012	6:27:54 PM	Bypass valve closed
3/19/2012	6:27:54 PM	Bubbler valve closed
3/19/2012	6:27:54 PM	Helium MFC set to  0.000000
3/19/2012	6:27:54 PM	H2 MFC set to  0.000000
3/19/2012	6:27:54 PM	BCl3 MFC set to  0.000000
3/19/2012	6:27:54 PM	PH3 MFC set to  0.000000
3/19/2012	6:27:54 PM	SiCl4 MFC set to  0.000000
3/19/2012	6:27:54 PM	Bypass solenoid MFC set to  0.000000
3/19/2012	6:27:54 PM	Tube furnace set to 0
3/19/2012	6:27:55 PM	Run finished at 6:27 PM
3/19/2012	6:27:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/19/2012	6:31:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/19/2012	6:31:43 PM	Recipe started at 6:31 PM
3/19/2012	6:31:43 PM	Helium valve closed
3/19/2012	6:31:43 PM	H2 valve closed
3/19/2012	6:31:43 PM	BCl3 valve closed
3/19/2012	6:31:43 PM	PH3 valve closed
3/19/2012	6:31:43 PM	SiCl4 pre valve closed
3/19/2012	6:31:43 PM	SiCl4 post valve closed
3/19/2012	6:31:43 PM	Main Vac valve closed
3/19/2012	6:31:43 PM	Bubbler valve closed
3/19/2012	6:31:43 PM	Bypass valve opened
3/19/2012	6:31:43 PM	Helium MFC set to  0.000000
3/19/2012	6:31:43 PM	H2 MFC set to  0.000000
3/19/2012	6:31:43 PM	BCl3 MFC set to  0.000000
3/19/2012	6:31:43 PM	PH3 MFC set to  0.000000
3/19/2012	6:31:43 PM	SiCl4 MFC set to  0.000000
3/19/2012	6:31:43 PM	Bypass solenoid MFC set to  0.000000
3/19/2012	6:31:43 PM	Tube furnace set to 0
3/19/2012	6:32:43 PM	Helium valve closed
3/19/2012	6:32:43 PM	H2 valve closed
3/19/2012	6:32:43 PM	BCl3 valve closed
3/19/2012	6:32:43 PM	PH3 valve closed
3/19/2012	6:32:43 PM	SiCl4 pre valve closed
3/19/2012	6:32:43 PM	SiCl4 post valve closed
3/19/2012	6:32:43 PM	Main Vac valve closed
3/19/2012	6:32:43 PM	Bubbler valve closed
3/19/2012	6:32:43 PM	Bypass valve opened
3/19/2012	6:32:43 PM	Helium MFC set to  0.000000
3/19/2012	6:32:43 PM	H2 MFC set to  0.000000
3/19/2012	6:32:43 PM	BCl3 MFC set to  0.000000
3/19/2012	6:32:43 PM	PH3 MFC set to  0.000000
3/19/2012	6:32:43 PM	SiCl4 MFC set to  0.000000
3/19/2012	6:32:43 PM	Bypass solenoid MFC set to  0.000000
3/19/2012	6:32:43 PM	Tube furnace set to 0
3/19/2012	6:33:43 PM	Helium valve closed
3/19/2012	6:33:43 PM	H2 valve closed
3/19/2012	6:33:43 PM	BCl3 valve closed
3/19/2012	6:33:43 PM	PH3 valve closed
3/19/2012	6:33:43 PM	SiCl4 pre valve closed
3/19/2012	6:33:43 PM	SiCl4 post valve closed
3/19/2012	6:33:43 PM	Bypass valve closed
3/19/2012	6:33:43 PM	Bubbler valve closed
3/19/2012	6:33:43 PM	Main Vac valve opened
3/19/2012	6:33:43 PM	Helium MFC set to  0.000000
3/19/2012	6:33:43 PM	H2 MFC set to  0.000000
3/19/2012	6:33:43 PM	BCl3 MFC set to  0.000000
3/19/2012	6:33:43 PM	PH3 MFC set to  0.000000
3/19/2012	6:33:43 PM	SiCl4 MFC set to  0.000000
3/19/2012	6:33:43 PM	Bypass solenoid MFC set to  0.000000
3/19/2012	6:33:44 PM	Tube furnace set to 0
3/19/2012	6:33:45 PM	Run finished at 6:33 PM
3/19/2012	6:33:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/19/2012	7:10:39 PM	Recipe started at 7:10 PM
3/19/2012	7:10:39 PM	Helium valve closed
3/19/2012	7:10:39 PM	H2 valve closed
3/19/2012	7:10:39 PM	BCl3 valve closed
3/19/2012	7:10:39 PM	PH3 valve closed
3/19/2012	7:10:39 PM	SiCl4 pre valve closed
3/19/2012	7:10:39 PM	SiCl4 post valve closed
3/19/2012	7:10:39 PM	Bypass valve closed
3/19/2012	7:10:39 PM	Bubbler valve closed
3/19/2012	7:10:39 PM	Main Vac valve opened
3/19/2012	7:10:39 PM	Helium MFC set to  0.000000
3/19/2012	7:10:39 PM	H2 MFC set to  0.000000
3/19/2012	7:10:39 PM	BCl3 MFC set to  0.000000
3/19/2012	7:10:39 PM	PH3 MFC set to  0.000000
3/19/2012	7:10:39 PM	SiCl4 MFC set to  0.000000
3/19/2012	7:10:39 PM	Bypass solenoid MFC set to  0.000000
3/19/2012	7:10:40 PM	Tube furnace set to 0
3/19/2012	7:40:40 PM	Helium valve closed
3/19/2012	7:40:40 PM	H2 valve closed
3/19/2012	7:40:40 PM	BCl3 valve closed
3/19/2012	7:40:40 PM	PH3 valve closed
3/19/2012	7:40:40 PM	SiCl4 pre valve closed
3/19/2012	7:40:40 PM	SiCl4 post valve closed
3/19/2012	7:40:40 PM	Main Vac valve closed
3/19/2012	7:40:40 PM	Bypass valve closed
3/19/2012	7:40:40 PM	Bubbler valve closed
3/19/2012	7:40:40 PM	Helium MFC set to  0.000000
3/19/2012	7:40:40 PM	H2 MFC set to  0.000000
3/19/2012	7:40:40 PM	BCl3 MFC set to  0.000000
3/19/2012	7:40:40 PM	PH3 MFC set to  0.000000
3/19/2012	7:40:40 PM	SiCl4 MFC set to  0.000000
3/19/2012	7:40:40 PM	Bypass solenoid MFC set to  0.000000
3/19/2012	7:40:40 PM	Tube furnace set to 0
3/19/2012	7:40:43 PM	Helium valve closed
3/19/2012	7:40:43 PM	BCl3 valve closed
3/19/2012	7:40:43 PM	PH3 valve closed
3/19/2012	7:40:43 PM	SiCl4 pre valve closed
3/19/2012	7:40:43 PM	SiCl4 post valve closed
3/19/2012	7:40:43 PM	Main Vac valve closed
3/19/2012	7:40:43 PM	Bypass valve closed
3/19/2012	7:40:43 PM	Bubbler valve closed
3/19/2012	7:40:43 PM	H2 valve opened
3/19/2012	7:40:43 PM	Helium MFC set to  0.000000
3/19/2012	7:40:43 PM	H2 MFC set to  500.000000
3/19/2012	7:40:43 PM	BCl3 MFC set to  0.000000
3/19/2012	7:40:43 PM	PH3 MFC set to  0.000000
3/19/2012	7:40:43 PM	SiCl4 MFC set to  0.000000
3/19/2012	7:40:43 PM	Bypass solenoid MFC set to  0.000000
3/19/2012	7:40:43 PM	Tube furnace set to 0
3/19/2012	7:41:48 PM	Helium valve closed
3/19/2012	7:41:48 PM	BCl3 valve closed
3/19/2012	7:41:48 PM	PH3 valve closed
3/19/2012	7:41:48 PM	SiCl4 pre valve closed
3/19/2012	7:41:48 PM	SiCl4 post valve closed
3/19/2012	7:41:48 PM	Main Vac valve closed
3/19/2012	7:41:48 PM	Bypass valve closed
3/19/2012	7:41:48 PM	H2 valve opened
3/19/2012	7:41:48 PM	Bubbler valve opened
3/19/2012	7:41:48 PM	Helium MFC set to  0.000000
3/19/2012	7:41:48 PM	H2 MFC set to  500.000000
3/19/2012	7:41:48 PM	BCl3 MFC set to  0.000000
3/19/2012	7:41:48 PM	PH3 MFC set to  0.000000
3/19/2012	7:41:48 PM	SiCl4 MFC set to  0.000000
3/19/2012	7:41:48 PM	Bypass solenoid MFC set to  0.000000
3/19/2012	7:41:48 PM	Tube furnace set to 0
3/19/2012	7:41:49 PM	Helium valve closed
3/19/2012	7:41:49 PM	BCl3 valve closed
3/19/2012	7:41:49 PM	PH3 valve closed
3/19/2012	7:41:49 PM	SiCl4 pre valve closed
3/19/2012	7:41:49 PM	SiCl4 post valve closed
3/19/2012	7:41:49 PM	Main Vac valve closed
3/19/2012	7:41:49 PM	Bypass valve closed
3/19/2012	7:41:49 PM	H2 valve opened
3/19/2012	7:41:49 PM	Bubbler valve opened
3/19/2012	7:41:49 PM	Helium MFC set to  0.000000
3/19/2012	7:41:49 PM	H2 MFC set to  500.000000
3/19/2012	7:41:49 PM	BCl3 MFC set to  0.000000
3/19/2012	7:41:49 PM	PH3 MFC set to  0.000000
3/19/2012	7:41:49 PM	SiCl4 MFC set to  0.000000
3/19/2012	7:41:49 PM	Bypass solenoid MFC set to  0.000000
3/19/2012	7:41:50 PM	Tube furnace set to 1000
3/19/2012	8:06:49 PM	Helium valve closed
3/19/2012	8:06:49 PM	PH3 valve closed
3/19/2012	8:06:50 PM	Main Vac valve closed
3/19/2012	8:06:50 PM	Bypass valve closed
3/19/2012	8:06:50 PM	H2 valve opened
3/19/2012	8:06:50 PM	BCl3 valve opened
3/19/2012	8:06:50 PM	SiCl4 pre valve opened
3/19/2012	8:06:50 PM	SiCl4 post valve opened
3/19/2012	8:06:50 PM	Bubbler valve opened
3/19/2012	8:06:50 PM	Helium MFC set to  0.000000
3/19/2012	8:06:50 PM	H2 MFC set to  450.000000
3/19/2012	8:06:50 PM	BCl3 MFC set to  1.500000
3/19/2012	8:06:50 PM	PH3 MFC set to  0.000000
3/19/2012	8:06:50 PM	SiCl4 MFC set to  50.000000
3/19/2012	8:06:50 PM	Bypass solenoid MFC set to  0.000000
3/19/2012	8:06:50 PM	Tube furnace set to 1000
3/19/2012	8:36:50 PM	Helium valve closed
3/19/2012	8:36:50 PM	BCl3 valve closed
3/19/2012	8:36:50 PM	PH3 valve closed
3/19/2012	8:36:50 PM	SiCl4 pre valve closed
3/19/2012	8:36:50 PM	SiCl4 post valve closed
3/19/2012	8:36:50 PM	Main Vac valve closed
3/19/2012	8:36:50 PM	Bypass valve closed
3/19/2012	8:36:50 PM	H2 valve opened
3/19/2012	8:36:50 PM	Bubbler valve opened
3/19/2012	8:36:50 PM	Helium MFC set to  0.000000
3/19/2012	8:36:50 PM	H2 MFC set to  500.000000
3/19/2012	8:36:50 PM	BCl3 MFC set to  0.000000
3/19/2012	8:36:50 PM	PH3 MFC set to  0.000000
3/19/2012	8:36:50 PM	SiCl4 MFC set to  0.000000
3/19/2012	8:36:50 PM	Bypass solenoid MFC set to  0.000000
3/19/2012	8:36:50 PM	Tube furnace set to 750
3/19/2012	8:51:50 PM	H2 valve closed
3/19/2012	8:51:50 PM	BCl3 valve closed
3/19/2012	8:51:50 PM	PH3 valve closed
3/19/2012	8:51:50 PM	SiCl4 pre valve closed
3/19/2012	8:51:50 PM	SiCl4 post valve closed
3/19/2012	8:51:50 PM	Main Vac valve closed
3/19/2012	8:51:50 PM	Bypass valve closed
3/19/2012	8:51:50 PM	Helium valve opened
3/19/2012	8:51:50 PM	Bubbler valve opened
3/19/2012	8:51:50 PM	Helium MFC set to  500.000000
3/19/2012	8:51:50 PM	H2 MFC set to  0.000000
3/19/2012	8:51:50 PM	BCl3 MFC set to  0.000000
3/19/2012	8:51:50 PM	PH3 MFC set to  0.000000
3/19/2012	8:51:50 PM	SiCl4 MFC set to  0.000000
3/19/2012	8:51:50 PM	Bypass solenoid MFC set to  0.000000
3/19/2012	8:51:50 PM	Tube furnace set to 0
3/19/2012	9:11:50 PM	Helium valve closed
3/19/2012	9:11:50 PM	H2 valve closed
3/19/2012	9:11:50 PM	BCl3 valve closed
3/19/2012	9:11:50 PM	PH3 valve closed
3/19/2012	9:11:50 PM	SiCl4 pre valve closed
3/19/2012	9:11:50 PM	SiCl4 post valve closed
3/19/2012	9:11:50 PM	Main Vac valve closed
3/19/2012	9:11:50 PM	Bypass valve closed
3/19/2012	9:11:50 PM	Bubbler valve closed
3/19/2012	9:11:50 PM	Helium MFC set to  0.000000
3/19/2012	9:11:50 PM	H2 MFC set to  0.000000
3/19/2012	9:11:50 PM	BCl3 MFC set to  0.000000
3/19/2012	9:11:50 PM	PH3 MFC set to  0.000000
3/19/2012	9:11:50 PM	SiCl4 MFC set to  0.000000
3/19/2012	9:11:50 PM	Bypass solenoid MFC set to  0.000000
3/19/2012	9:11:50 PM	Tube furnace set to 0
3/19/2012	9:31:50 PM	Helium valve closed
3/19/2012	9:31:50 PM	H2 valve closed
3/19/2012	9:31:50 PM	BCl3 valve closed
3/19/2012	9:31:50 PM	PH3 valve closed
3/19/2012	9:31:50 PM	SiCl4 pre valve closed
3/19/2012	9:31:50 PM	SiCl4 post valve closed
3/19/2012	9:31:50 PM	Main Vac valve closed
3/19/2012	9:31:50 PM	Bubbler valve closed
3/19/2012	9:31:50 PM	Bypass valve opened
3/19/2012	9:31:50 PM	Helium MFC set to  0.000000
3/19/2012	9:31:50 PM	H2 MFC set to  0.000000
3/19/2012	9:31:50 PM	BCl3 MFC set to  0.000000
3/19/2012	9:31:50 PM	PH3 MFC set to  0.000000
3/19/2012	9:31:50 PM	SiCl4 MFC set to  0.000000
3/19/2012	9:31:50 PM	Bypass solenoid MFC set to  0.000000
3/19/2012	9:31:50 PM	Tube furnace set to 0
3/19/2012	9:32:35 PM	Helium valve closed
3/19/2012	9:32:35 PM	H2 valve closed
3/19/2012	9:32:35 PM	BCl3 valve closed
3/19/2012	9:32:35 PM	PH3 valve closed
3/19/2012	9:32:35 PM	SiCl4 pre valve closed
3/19/2012	9:32:35 PM	SiCl4 post valve closed
3/19/2012	9:32:35 PM	Main Vac valve closed
3/19/2012	9:32:35 PM	Bubbler valve closed
3/19/2012	9:32:35 PM	Bypass valve opened
3/19/2012	9:32:35 PM	Helium MFC set to  0.000000
3/19/2012	9:32:35 PM	H2 MFC set to  0.000000
3/19/2012	9:32:35 PM	BCl3 MFC set to  0.000000
3/19/2012	9:32:35 PM	PH3 MFC set to  0.000000
3/19/2012	9:32:35 PM	SiCl4 MFC set to  0.000000
3/19/2012	9:32:35 PM	Bypass solenoid MFC set to  0.000000
3/19/2012	9:32:35 PM	Tube furnace set to 0
3/19/2012	9:33:35 PM	Helium valve closed
3/19/2012	9:33:35 PM	H2 valve closed
3/19/2012	9:33:35 PM	BCl3 valve closed
3/19/2012	9:33:35 PM	PH3 valve closed
3/19/2012	9:33:35 PM	SiCl4 pre valve closed
3/19/2012	9:33:35 PM	SiCl4 post valve closed
3/19/2012	9:33:35 PM	Bypass valve closed
3/19/2012	9:33:35 PM	Bubbler valve closed
3/19/2012	9:33:35 PM	Main Vac valve opened
3/19/2012	9:33:35 PM	Helium MFC set to  0.000000
3/19/2012	9:33:35 PM	H2 MFC set to  0.000000
3/19/2012	9:33:36 PM	BCl3 MFC set to  0.000000
3/19/2012	9:33:36 PM	PH3 MFC set to  0.000000
3/19/2012	9:33:36 PM	SiCl4 MFC set to  0.000000
3/19/2012	9:33:36 PM	Bypass solenoid MFC set to  0.000000
3/19/2012	9:33:36 PM	Tube furnace set to 0
3/19/2012	10:05:44 PM	Run aborted at 10:05 PM
3/19/2012	10:05:44 PM	Helium valve closed
3/19/2012	10:05:44 PM	H2 valve closed
3/19/2012	10:05:44 PM	BCl3 valve closed
3/19/2012	10:05:44 PM	PH3 valve closed
3/19/2012	10:05:44 PM	SiCl4 pre valve closed
3/19/2012	10:05:44 PM	SiCl4 post valve closed
3/19/2012	10:05:44 PM	Bypass valve closed
3/19/2012	10:05:44 PM	Main Vac valve closed
3/19/2012	10:05:44 PM	Bubbler valve closed
3/19/2012	10:05:44 PM	Helium MFC set to  0.000000
3/19/2012	10:05:44 PM	H2 MFC set to  0.000000
3/19/2012	10:05:44 PM	BCl3 MFC set to  0.000000
3/19/2012	10:05:44 PM	PH3 MFC set to  0.000000
3/19/2012	10:05:44 PM	SiCl4 MFC set to  0.000000
3/19/2012	10:05:44 PM	Tube furnace set to 0
3/19/2012	10:05:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/19/2012	10:05:47 PM	Recipe started at 10:05 PM
3/19/2012	10:05:47 PM	Helium valve closed
3/19/2012	10:05:47 PM	H2 valve closed
3/19/2012	10:05:47 PM	BCl3 valve closed
3/19/2012	10:05:47 PM	PH3 valve closed
3/19/2012	10:05:47 PM	SiCl4 pre valve closed
3/19/2012	10:05:47 PM	SiCl4 post valve closed
3/19/2012	10:05:47 PM	Main Vac valve closed
3/19/2012	10:05:47 PM	Bypass valve closed
3/19/2012	10:05:47 PM	Bubbler valve closed
3/19/2012	10:05:47 PM	Helium MFC set to  0.000000
3/19/2012	10:05:47 PM	H2 MFC set to  0.000000
3/19/2012	10:05:47 PM	BCl3 MFC set to  0.000000
3/19/2012	10:05:48 PM	PH3 MFC set to  0.000000
3/19/2012	10:05:48 PM	SiCl4 MFC set to  0.000000
3/19/2012	10:05:48 PM	Bypass solenoid MFC set to  0.000000
3/19/2012	10:05:48 PM	Tube furnace set to 0
3/19/2012	10:05:51 PM	H2 valve closed
3/19/2012	10:05:51 PM	BCl3 valve closed
3/19/2012	10:05:51 PM	PH3 valve closed
3/19/2012	10:05:51 PM	SiCl4 pre valve closed
3/19/2012	10:05:51 PM	SiCl4 post valve closed
3/19/2012	10:05:51 PM	Main Vac valve closed
3/19/2012	10:05:51 PM	Bypass valve closed
3/19/2012	10:05:51 PM	Bubbler valve closed
3/19/2012	10:05:51 PM	Helium valve opened
3/19/2012	10:05:51 PM	Helium MFC set to  500.000000
3/19/2012	10:05:51 PM	H2 MFC set to  0.000000
3/19/2012	10:05:51 PM	BCl3 MFC set to  0.000000
3/19/2012	10:05:51 PM	PH3 MFC set to  0.000000
3/19/2012	10:05:51 PM	SiCl4 MFC set to  0.000000
3/19/2012	10:05:51 PM	Bypass solenoid MFC set to  0.000000
3/19/2012	10:05:51 PM	Tube furnace set to 0
3/19/2012	10:06:52 PM	Helium valve closed
3/19/2012	10:06:52 PM	H2 valve closed
3/19/2012	10:06:52 PM	BCl3 valve closed
3/19/2012	10:06:52 PM	PH3 valve closed
3/19/2012	10:06:52 PM	SiCl4 pre valve closed
3/19/2012	10:06:52 PM	SiCl4 post valve closed
3/19/2012	10:06:52 PM	Main Vac valve closed
3/19/2012	10:06:52 PM	Bypass valve closed
3/19/2012	10:06:52 PM	Bubbler valve closed
3/19/2012	10:06:52 PM	Helium MFC set to  0.000000
3/19/2012	10:06:52 PM	H2 MFC set to  0.000000
3/19/2012	10:06:52 PM	BCl3 MFC set to  0.000000
3/19/2012	10:06:52 PM	PH3 MFC set to  0.000000
3/19/2012	10:06:52 PM	SiCl4 MFC set to  0.000000
3/19/2012	10:06:52 PM	Bypass solenoid MFC set to  0.000000
3/19/2012	10:06:52 PM	Tube furnace set to 0
3/19/2012	10:06:53 PM	Run finished at 10:06 PM
3/19/2012	10:06:53 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/19/2012	10:07:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/19/2012	10:07:32 PM	Recipe started at 10:07 PM
3/19/2012	10:07:32 PM	Helium valve closed
3/19/2012	10:07:32 PM	H2 valve closed
3/19/2012	10:07:32 PM	BCl3 valve closed
3/19/2012	10:07:32 PM	PH3 valve closed
3/19/2012	10:07:32 PM	SiCl4 pre valve closed
3/19/2012	10:07:33 PM	SiCl4 post valve closed
3/19/2012	10:07:33 PM	Main Vac valve closed
3/19/2012	10:07:33 PM	Bypass valve closed
3/19/2012	10:07:33 PM	Bubbler valve closed
3/19/2012	10:07:33 PM	Helium MFC set to  0.000000
3/19/2012	10:07:33 PM	H2 MFC set to  0.000000
3/19/2012	10:07:33 PM	BCl3 MFC set to  0.000000
3/19/2012	10:07:33 PM	PH3 MFC set to  0.000000
3/19/2012	10:07:33 PM	SiCl4 MFC set to  0.000000
3/19/2012	10:07:33 PM	Bypass solenoid MFC set to  0.000000
3/19/2012	10:07:33 PM	Tube furnace set to 0
3/19/2012	10:07:36 PM	H2 valve closed
3/19/2012	10:07:36 PM	BCl3 valve closed
3/19/2012	10:07:36 PM	PH3 valve closed
3/19/2012	10:07:36 PM	SiCl4 pre valve closed
3/19/2012	10:07:36 PM	SiCl4 post valve closed
3/19/2012	10:07:36 PM	Main Vac valve closed
3/19/2012	10:07:36 PM	Bypass valve closed
3/19/2012	10:07:36 PM	Bubbler valve closed
3/19/2012	10:07:36 PM	Helium valve opened
3/19/2012	10:07:36 PM	Helium MFC set to  500.000000
3/19/2012	10:07:36 PM	H2 MFC set to  0.000000
3/19/2012	10:07:36 PM	BCl3 MFC set to  0.000000
3/19/2012	10:07:36 PM	PH3 MFC set to  0.000000
3/19/2012	10:07:36 PM	SiCl4 MFC set to  0.000000
3/19/2012	10:07:36 PM	Bypass solenoid MFC set to  0.000000
3/19/2012	10:07:36 PM	Tube furnace set to 0
3/19/2012	10:07:36 PM	Helium valve closed
3/19/2012	10:07:36 PM	H2 valve closed
3/19/2012	10:07:36 PM	BCl3 valve closed
3/19/2012	10:07:36 PM	PH3 valve closed
3/19/2012	10:07:36 PM	SiCl4 pre valve closed
3/19/2012	10:07:36 PM	SiCl4 post valve closed
3/19/2012	10:07:36 PM	Main Vac valve closed
3/19/2012	10:07:36 PM	Bypass valve closed
3/19/2012	10:07:36 PM	Bubbler valve closed
3/19/2012	10:07:36 PM	Helium MFC set to  0.000000
3/19/2012	10:07:36 PM	H2 MFC set to  0.000000
3/19/2012	10:07:36 PM	BCl3 MFC set to  0.000000
3/19/2012	10:07:36 PM	PH3 MFC set to  0.000000
3/19/2012	10:07:36 PM	SiCl4 MFC set to  0.000000
3/19/2012	10:07:36 PM	Bypass solenoid MFC set to  0.000000
3/19/2012	10:07:36 PM	Tube furnace set to 0
3/19/2012	10:07:37 PM	Run finished at 10:07 PM
3/19/2012	10:07:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/19/2012	10:10:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/19/2012	10:10:50 PM	Recipe started at 10:10 PM
3/19/2012	10:10:50 PM	Helium valve closed
3/19/2012	10:10:50 PM	H2 valve closed
3/19/2012	10:10:50 PM	BCl3 valve closed
3/19/2012	10:10:50 PM	PH3 valve closed
3/19/2012	10:10:50 PM	SiCl4 pre valve closed
3/19/2012	10:10:50 PM	SiCl4 post valve closed
3/19/2012	10:10:50 PM	Main Vac valve closed
3/19/2012	10:10:50 PM	Bubbler valve closed
3/19/2012	10:10:50 PM	Bypass valve opened
3/19/2012	10:10:50 PM	Helium MFC set to  0.000000
3/19/2012	10:10:50 PM	H2 MFC set to  0.000000
3/19/2012	10:10:50 PM	BCl3 MFC set to  0.000000
3/19/2012	10:10:50 PM	PH3 MFC set to  0.000000
3/19/2012	10:10:50 PM	SiCl4 MFC set to  0.000000
3/19/2012	10:10:50 PM	Bypass solenoid MFC set to  0.000000
3/19/2012	10:10:50 PM	Tube furnace set to 0
3/19/2012	10:11:49 PM	Helium valve closed
3/19/2012	10:11:49 PM	H2 valve closed
3/19/2012	10:11:49 PM	BCl3 valve closed
3/19/2012	10:11:49 PM	PH3 valve closed
3/19/2012	10:11:49 PM	SiCl4 pre valve closed
3/19/2012	10:11:49 PM	SiCl4 post valve closed
3/19/2012	10:11:49 PM	Main Vac valve closed
3/19/2012	10:11:49 PM	Bubbler valve closed
3/19/2012	10:11:49 PM	Bypass valve opened
3/19/2012	10:11:49 PM	Helium MFC set to  0.000000
3/19/2012	10:11:49 PM	H2 MFC set to  0.000000
3/19/2012	10:11:49 PM	BCl3 MFC set to  0.000000
3/19/2012	10:11:49 PM	PH3 MFC set to  0.000000
3/19/2012	10:11:49 PM	SiCl4 MFC set to  0.000000
3/19/2012	10:11:49 PM	Bypass solenoid MFC set to  0.000000
3/19/2012	10:11:49 PM	Tube furnace set to 0
3/19/2012	10:12:49 PM	Helium valve closed
3/19/2012	10:12:49 PM	H2 valve closed
3/19/2012	10:12:49 PM	BCl3 valve closed
3/19/2012	10:12:49 PM	PH3 valve closed
3/19/2012	10:12:49 PM	SiCl4 pre valve closed
3/19/2012	10:12:49 PM	SiCl4 post valve closed
3/19/2012	10:12:49 PM	Bypass valve closed
3/19/2012	10:12:49 PM	Bubbler valve closed
3/19/2012	10:12:49 PM	Main Vac valve opened
3/19/2012	10:12:49 PM	Helium MFC set to  0.000000
3/19/2012	10:12:49 PM	H2 MFC set to  0.000000
3/19/2012	10:12:49 PM	BCl3 MFC set to  0.000000
3/19/2012	10:12:49 PM	PH3 MFC set to  0.000000
3/19/2012	10:12:49 PM	SiCl4 MFC set to  0.000000
3/19/2012	10:12:49 PM	Bypass solenoid MFC set to  0.000000
3/19/2012	10:12:49 PM	Tube furnace set to 0
3/19/2012	10:12:50 PM	Run finished at 10:12 PM
3/19/2012	10:12:50 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/19/2012	10:13:09 PM	Recipe started at 10:13 PM
3/19/2012	10:13:09 PM	Helium valve closed
3/19/2012	10:13:09 PM	H2 valve closed
3/19/2012	10:13:09 PM	BCl3 valve closed
3/19/2012	10:13:09 PM	PH3 valve closed
3/19/2012	10:13:09 PM	SiCl4 pre valve closed
3/19/2012	10:13:09 PM	SiCl4 post valve closed
3/19/2012	10:13:09 PM	Bypass valve closed
3/19/2012	10:13:09 PM	Bubbler valve closed
3/19/2012	10:13:09 PM	Main Vac valve opened
3/19/2012	10:13:09 PM	Helium MFC set to  0.000000
3/19/2012	10:13:09 PM	H2 MFC set to  0.000000
3/19/2012	10:13:09 PM	BCl3 MFC set to  0.000000
3/19/2012	10:13:09 PM	PH3 MFC set to  0.000000
3/19/2012	10:13:09 PM	SiCl4 MFC set to  0.000000
3/19/2012	10:13:09 PM	Bypass solenoid MFC set to  0.000000
3/19/2012	10:13:09 PM	Tube furnace set to 0
